Research Interests
directional plasma etching, dry wafer cleaning, kinetics, surface science, process modeling
Education
Ph.D., University of California at Berkeley, 1980
B.S., Iowa State University, 1973
Publications
Honors and Awards
Professional Achievement Citation in Engineering, Iowa State, 1994
Thinker Award presented by Tegal Corporation for Innovative Characterization and Modeling of Plasma Etching Processes, 1987
