Herbert H. Sawin

Herbert H. Sawin

Professor Emeritus of Chemical Engineering and Electrical Engineering & Computer Science

Research Interests

directional plasma etching, dry wafer cleaning, kinetics, surface science, process modeling


Ph.D., University of California at Berkeley, 1980

B.S., Iowa State University, 1973


Honors and Awards

Professional Achievement Citation in Engineering, Iowa State, 1994

Thinker Award presented by Tegal Corporation for Innovative Characterization and Modeling of Plasma Etching Processes, 1987