Research Interests

directional plasma etching, dry wafer cleaning, kinetics, surface science, process modeling

Education

Ph.D., University of California at Berkeley, 1980

B.S., Iowa State University, 1973

Publications

Honors and Awards

Professional Achievement Citation in Engineering, Iowa State, 1994

Thinker Award presented by Tegal Corporation for Innovative Characterization and Modeling of Plasma Etching Processes, 1987