Faculty Herbert H. Sawin FacultyHerbert H. SawinProfessor Emeritus of Chemical Engineering and Electrical Engineering & Computer Science phone617.253.4570fax617.253.2072emailhhsawin@mit.eduroom66-454 Research Website Research Interests directional plasma etching, dry wafer cleaning, kinetics, surface science, process modeling Education Ph.D., University of California at Berkeley, 1980 B.S., Iowa State University, 1973 Publications Honors and Awards Professional Achievement Citation in Engineering, Iowa State, 1994 Thinker Award presented by Tegal Corporation for Innovative Characterization and Modeling of Plasma Etching Processes, 1987